Yamato PDC610 Multi Stage Plasma Cleaner (600W)

Plasma Mode: RIE/DP selectable

Electrode structure: 3-stage independent parallel flat plates

Vacuum gauge: Capacitance manometer

High frequency output: Max 600W

Oscillation Frequency: 13.56MHz Quartz oscillator

Output setting method: Manual setting on LCD touch panel

Matching method: Auto tuning

Chamber size: W350×D270×H300 mm

Stage size: W250×D220mm Three stages

Chamber material: Aluminum

Reaction gas: 2 systems (Argon, Oxygen)

Purge gas: Nitrogen or dry air

Rotary vacuum pump: Approx. 345L/min. (Provided)

External dimensions（W×D×H mm）: W600×D722×H700 mm

Weight: Approx. 170kg

Power Source: AC220V~AC 415V 3-phase with step-down transformer

Standard accessories: Rotary vacuum pump×1 set, Oilmist eliminator×1 pc, Clamp×3 pcs, Center ring×3 pcs, Flexible tube×1 pc

Datasheet