OMEGA FMA6504ST Mass Flow Controller w/RS485 Standard and Alarm Functions (20 SCCM, ± 1 %, 1/4 in, Compression Fitting)

Accuracy: ± 1 %

Calibration: NIST 10-Point Certificate

Display Type: None

Accuracy Note: Accuracy (including linearity): 15 to 25°C (59 to 77°F) and 0.7 to 4 bar (10 to 60 psia): ± 1% of FS, 0 to 50°C (32 to 122°F) and 0.3 to 10 bar (5 to 150 psia): ± 2% of FS, ± 1% of FS at a specific temperature and pressure with special calibration

Control Valve: Solenoid Valve

Output Detail: Linear 0 to 5 Vdc (2000 Ω min load impedance); 0 to 10 Vdc (4000 Ω min impedance); 4 to 20 mA optional (0 to 500 Ω loop resistance)

Output Signal: Voltage

Pressure, Max: 50 psi

Repeatability: ± 0.15%

Response Time: 1 sec

Data Interface: RS485

Supply Current: Up to 450 mA

Supply Voltage: ± 15 Vdc

Turndown Ratio: 50:1

Optimum Pressure: 25 psi

Electrical Output: 0 to 5 V

Enclosure Ratings: Inst. Level II/Poll. Degree II (IEC 60664)

Materials, Wetted: 316 Stainless Steel, 416 Stainless Steel, FKM

Circuit Protection: Reverse polarity, Current Limit, Resettable Fuse

Pressure Drop, Max: 1.06 psi

Response Time Note: 0.6 to 1.0 s to within ± 2% of setpoint over 20% to 100% FS

Data Interface Note: RS485, standard; RS232, optional

Media Compatibility: Air, Gases, Nitrogen, Oxygen

Pressure Coefficient: 0.01% FS/psi

Additional Features 1: 2 SPDT 1A Relay

Electrical Connection: Sub-D Male Miniature Connector

Leak Rate Under Vacuum: less than 10^⁻9 cc He/s

Operating Pressure, Max: 500 psi

Operating Pressure, Min: 0 psi

Process Connection Size: 1/4 in

Process Connection Type: Compression Fitting

Temperature Coefficient: 0.05% FS/°C

Volumetric Flow Rate, Max: 20 SCCM

Volumetric Flow Rate, Min: 0.2 SCCM

Operating Temperature, Max: 50 °C

Operating Temperature, Min: 5 °C

Datasheet