MKS VISION-2000-A-XD High Sensitivity RGA for ALD & CVD (1-100, 1-200, 1-300 amu)

Mass Range: 1-100, 1-200, or 1-300 amu

Ion Source: High conductance closed ion source

Filaments: Independently replaceable twin Tungsten or Thoria filaments

Mass Filter: Double filter (1 in. "RF only" pre-filter with 4 in. main filter)

Detector: Dual (Faraday and secondary electron multiplier)

Maximum Analyzer Operating Pressure: 1e-3 Torr at the ion source inlet (standard), higher pressure optional

Mass Stability: Better than ±0.1 amu over 8 hours

Resolution: Better than 10% valley for peaks of equal height across mass range

Operating Temperature: 70°C (controlled to ±1°C)

Weight: 33 lbs. (15 kg) to bolt on Process System

Mechanical Support: Optional stands and brackets are available

Pneumatics: 60-80 psig CDA

Electronics Weight on Flange: 1.7 kg

Power Requirements: 88 - 264 VAC, 47/63 Hz, 600 W

Maximum Operating Conditions: Electronics: 10 - 40°C, 80% RH (non condensing)

Communication: Ethernet CAT-5e

Shipping Weight: 132 lbs (60 Kg) may vary depending upon backing pump and instrument rack requirements

Compliance: CE, UKCA

Literature

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