MKS P4B-MFM High Performance Mass Flow Meter (5-50000 sccm)

Full Scale Flow Range: 5-50000 sccm

Measurement Range: 0.1-100% of Full Scale

Maximum Inlet Pressure: 500 psig

Proof Pressure: 1000 psig

Burst Pressure: 1500 psig

Typical Accuracy: ±1% of set point for 20-100% Full Scale

±0.2% of Full Scale for 2-20% Full Scale

Repeatability: ±0.3% of Reading

Resolution: 0.1% of Full Scale

Zero Temperature Coefficient: <0.05% of Full Scale./°C

Span Temperature Coefficient: <0.08% of Reading./°C

Inlet Pressure Coefficient: <0.02% of Reading/psi

Operating Temperature: 10-50°C

Storage Humidity: 0-95% relative humidity, non-condensing

Storage Temperature: -20° to 80°C (-4° to 149° F)

Temperature Display: 0-100°C

Temperature Accuracy: ±2°C

Temperature Resolution: 0.1°C

Display: 4 digits for value, 4 characters for unit

Weight: <2.5 lbs (1.1kg)

Compliance: CE

Power Requirements: +15 to +24 VDC @ 200mA max

Analog I/O Connector: 15-pin Type “D” Male, 9 pin Type “D” Male

Flow Input Output Signal: 0 to 5 VDC

DeviceNet Connector: 5 pin microconnnector (DeviceNet)

RS485 Connector: 9 pin Type “D” Male

For specific range please check the attachment below!

Literature

Drawing