MKS GM100A Metal Sealed, Digital Mass Flow Controller (50-100 slm)

Control Range: 2% to 100% of Full Scale

Full Scale Flow Range: 50,000 - 100,000 sccm (N2 equivalent)

Flow Input Output Signal: Voltage: (0 to 5 VDC) 15 pin Type "D" male, 9 pin Type "D" male, Current: (4 to 20 mA) 15 pin Type "D" male

Maximum Inlet Pressure: 150 psig

Normal Operating Pressure Differential: 50,000 - 100,000 sccm; 40 to 80 psid

Proof Pressure: 1000 psig

Burst Pressure: 1500 psig

Typical Accuracy: ± 1% of set point for 20 to 100% Full Scale, ±0.2% of Full Scale for 2 to 20% Full Scale

Repeatability: ±0.3% of Reading

Resolution: 0.1% of Full Scale

Zero Temperature Coefficient: <0.05% of Full Scale/°C

Span Temperature Coefficient: <0.08% of Reading/°C

Inlet Pressure Coefficient: <0.02% of Reading/psi

Typical Settling Time: <750 msec., typical above 10% Full Scale

Warm-up Time: 30 minutes

Operating Temperature: 10° to 50°C

Storage Humidity: 0 to 95% Relative Humidity, non-condensing

Storage Temperature: -20° to 80°C

External Leak Integrity:<1 x 10-10 (scc/sec He)

Leak Integrity Through Closed Valve: <1.0% of Full Scale at 40 psig inlet to atmosphere

Wetted Materials: 316L Stainless Steel VAR, 316 Stainless Steel, Elgiloy®, Nickel

Surface Finish: 10µ inch average Ra

Weight: 3 lbs (1.4 kg)

Compliance: CE

For specific range please check the attachment below!

Literature

Drawing