MKS DA03B Heated Absolute Baratron® Capacitance Manometer (EtherCAT; 150~200°C)

Full Scale Pressure Ranges: 1, 2, 3, 5, 10, 20, 100, 1000 Torr

Accuracy: ±0.25% of Reading

Temperature Coefficients – Zero:

- 150°C/160°C: ±0.004% Full Scale/°C for >1 Torr

±0.008% Full Scale/°C for 1 Torr range

- 200°C: ±0.008% Full Scale/°C for >1 Torr

±0.016% Full Scale/°C for 1 Torr range

Temperature Coefficients – Span: ±0.02% Reading/°C

Response Time:

- Analog/Digital: 35 ms (nominal) influenced by pressure range, step size, and digital pressure filter settings

- EtherCAT: Refresh Rate = 3.3 ms

Internal Volume: 6.3 cm3 typical

Input Power: ±15 VDC @ 1.6A or +24 VDC @ 1.3A at start up (factory set)

Output Signal: Analog 0-10 VDC into >10kW load, EtherCAT

Warmup Time: 2.5 hours typical

Operating Temperature Range: 15 to 50°C

Ambient Airflow Requirements:

- 150/160°C Models: 50 ft/min for ambient temperatures of 40 - 50°C

- 200°C Models: 150 ft/min for ambient temperatures of 40 - 50°C

Resolution: 0.001% of Full Scale

Overpressure Limit: 45 psia

Materials Exposed to Process Gases: Inconel® and Incoloy® nickel alloys (some fitting options are 300 Series Stainless)

Fittings:

- Standard: ½'' (12 mm) OD tube

- Optional: Swagelok® 8 VCR® female, 8 VCR male, NW16-KF, NW25-KF, Mini-CF, 1.5'' TriClover, and 2'' TriClover

Compliance: CE, UL1577 (Trip Relays only)

For specific range please check the attachment below!

Literature

Drawing