MKS AX8410 SEMOZON® PRIME Ozone Generator (5 - 80 slm)

Ozone Output: up to 335 g/Nm3

Flow Rate: 5 - 80 slm

Feed Gas: Oxygen: Grade 6 or better O2

Nitrogen: 100 - 1000 ppm Grade 5 or better N2

Nominal Cell Pressure (Delivery): 15 - 45 psig (100 - 310 kPa)

Pressure: 20 - 50 psig

Control Interface: Front panel control and remote operation

Cooling Water Temperature: 5 - 25°C (41 - 77°F)

Cooling Water Filtration: 100 microns

Cooling Water Quality: Resistivity ≥50 KΩ/cm

Minimum Water Flow: 22.7 lpm (6.0 gpm)

Voltage Requirements: 208 VAC (±10%) 3Ø & Ground, no Neutral

Current Requirements: 50 Amps

Frequency: 50/60 Hz

Weight: 77 kg (170 lb)

Dimensions: 483 x 521 x 267 mm (19.0 x 20.5 x 10.5 in) (width x depth x height)

Compliance: CE, UL/CSA, and SEMI F47

Literature

Drawing

Application note