MKS AX2600-AX2700 Microwave Plasma Subsystems (1.8 / 3kW; 2440-2470MHz)
ManufacturerMKS(View more products from this manufacturer)
ModelAX2600-AX2700
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Maximum Plasma Power Output: 1.8 or 3.0 kW
Frequency: 2440 - 2470 MHz
Output Accuracy: ±1.5% (from 20 - 100% of max. power)
Power Requirements: 200/208 VAC ±10%, 3 phase, 50/60 Hz
Chemistries: O2 , N2 , H2 O, Ar, NF3 , CF4 , C2 F6 , NH3
Applicator Material: Quartz, Sapphire
Operating Pressure: 2 - 8 Torr
Communications: Analog, RS485, DeviceNet™ or EtherCAT®
Compliance: CE, ETL, SEMI S2-93A, SEMI F47
Time to Match: < 2 sec
Total Gas Flow: 1 - 7 slm
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