MKS 649B Downstream Pressure Controllers with Mass Flow Meter (10~1000 Torr)

Type: 649 Pressure Controller with Capacitance Manometer and Mass Flow Meter

Pressure Range: 10, 20, 50, 100, 1000 mmHg (Torr) Full Scale

Flow Rate: 10, 20, 50, 100, 200, 500, 1000, 2000, 5000 sccm (Full Scale)

Trip Points: Pressure: Two open-collector transistors

Rated: 250 mA @ 30 VDC

Adjustable: 1 to 100% of Full Scale

Hysteresis: 3% of Full Scale

Indicators: Green LEDs on when actuated

Pressure Control Accuracy: ±0.2% of Full Scale

Transducer Over Pressure Limit: 45 psia or 2x Full Scale, whichever is greater

Pressure Measurement Accuracy: ±0.5% of Reading (includes linearity, hysteresis, and repeatability)

Control Range: 2 to 100% of Full Scale

Typical Response Time: 1.0 sec (excluding system time constant)

Operating Temperature: 0 to 50°C (32 to 122°F)

Storage Temperature: -20 to 80°C (-4 to 176°F)

Flow Measurement Range: 1% to 100% of Full Scale

Flow Repeatability: ±0.2% of Full Scale

Flow Resolution: 0.1% of Full Scale

Flow Accuracy: ±1.0% of Full Scale (including non-linearity, hysteresis, and non-repeatability referenced to 760 mmHg and 0°C)

Input Power: ±15 VDC ±5%, 300 mA max.

Connector: 15-pin male Type “D"

Meter Response Time: <100 msec

Input-Output Signals:

Pressure: 0-10 VDC default (user settable to 0-5 VDC)

Cable Length: 100 ft. (30 m) max.

Compliance: CE

For specific range please check the attachment below!

Literature

Manual