MKS 1152C Mass-Flo® Vapor Source Mass Flow Controller (1 - 1000 sccm; Laminar Flow)

Flow Method: Viscous flow through a laminar flow tube

Full Scale Flow Range: 1 to 1000 sccm (N2 equivalent)

Control Range: 5.0 to 100% of Full Scale

Typical Accuracy: ±5.0% of Full Scale

Repeatability: ±0.2% of Full Scale

Resolution: ±0.1% of Full Scale

Operating Temperature: 30°C to 100°C, adjustable

Optional Operating Temperature Range: 90°C to 150°C

Controller Input Power Required: ±15 VDC (±2%) @ 0.28 Amps

Heater Input Power Required: ±15 VDC @ 1.5 Amps

Set Point Signal: 0-5 VDC from <20K Ω

Flow Output Signal: 0-5 VDC into >10K Ω

Temperature Output: 10 mV/°C

Relay Contact Ratings: 2 Amps @ 28 VDC; 1 Amp @ 120 VAC resistive

Signal Connector: 15-pin Type "D", RFI/EMI shielded

Heater Connector: 9-pin Type "D", RFI/EMI shielded

Maximum Line Pressure: 35 psia

Fitting Type: Swagelok ® 8 VCR® male

Weight: 7.9 lbs (3.59 kg)

Compliance: CE

For specific range please check the attachment below!

Literature

Manual

Drawing