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X,Y-axis: 100x100mm(4inx4in)
Z-axis: 100mm (4in)
Measuring mode: High-resolution mode and Normal mode
Accuracy(on monitor): QI-A models 2µm (high-resolution mode), ±4µm (normal mode) QI-B models:1.5µm (high resolution mode)3µm(normal mode)
Measuring accuracy (U1XY): ±(3.5+0.02L)µm L = measuring length (mm)
Repeatability: 0.7µm (high resolution mode)1µm(normal mode)
CCD Camera: 3 Megapixels,1/2 inch color CCD camera
Optical system:
Magnification- 0.2X, double telecentric system
Working distance-90mm
Depth of focus-±0.6mm (high-resolution mode), ±11mm (normal mode)
Illumination: Contour Surface 4-quadrant LED
Stage glass size: 6.7x6.7in 170x170mm
Max.loading: 5kg 11lbs
Mass: 154lbs 6070kg
Optional accessories
Holder with clamp
V-block with clamp
Swivel center support
Stage adapter sets
Foot switch
