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X,Y-axis: 200x170mm(8inx7in)
Z-axis: 100mm (4in)
Measuring mode: High-resolution mode and Normal mode
Accuracy(on monitor): 2µm (high-resolution mode), ±4µm (normal mode)
Measuring accuracy (U1XY): ±(3.5+0.02L)µm L = measuring length (mm)
Repeatability: 1µm (high-resolution mode), ±2µm (normal mode
CCD Camera: 3 Megapixels,1/2 inch color CCD camera
Optical system: Magnification- 0.2X, double telecentric system
Working distance-90mm
Depth of focus-±0.6mm (high-resolution mode), ±11mm (normal mode)
Illumination: Contour Surface 4-quadrant LED
Stage glass size: 10.2x9in 260x230mm
Max.loading: 20kg 44lbs
Mass: 308lbs 140kg
Optional accessories
Holder with clamp
V-block with clamp
Swivel center support
Stage adapter sets
Foot switch
