KoCoS WATOM T 12 Edge Profile Measuring in Lab (150/200 mm)

Throughput: 50 wafers/h with 16 profile measurement points, notch/flat and diameter measurement

MTBF: 1000 h

MTTR: < 4 h

Accuracy (Radii): ± 2 µm (standard deviation 1 µm)

Accuracy (Half angles): ± 0.3° (standard deviation 0.1°)

Accuracy (Blunt lengths): ± 3 µm (standard deviation 2 µm)

Accuracy (Facet lengths): ± 3 µm (standard deviation 2 µm)

Profile deformation: > 8 µm

Control interface: Ethernet

Input voltage: 88 to 264 VAC, 47 to 63 Hz

CDA: 0.6 MPa (87 psi)

Operating temperature: 20 to 24 °C

Diameters: 12 (150/200 mm)

Options: FFU

Options: Console

Options: Light tower

Options: GEM-SECS-II Interface

Brochure