KoCoS LOTOS CR 3D measurement and inspection (70 ~ 110 mm/ 360 ~ 400 mm)

Measuring sensor : Point sensor

Measuring range (Dimension from … to …): Variable between 70 … 110 mm and 360 … 400 mm

Repeat accuracy : 0.3 µm

Measuring range (Dimension / Diameter): 40 mm

(Difference between largest and smallest dimension of the measured object)

Measuring height range (with one component rotation): 0.001 mm

Throughput related to object height 15 mm : 18 s

Throughput related to object height 60 mm : 63 s

Max. Measuring object height : 500 mm

Throughput for single target cross-section : 4.5 s

Linearity - Dimension : ±0.25-1.5µm

Datasheet