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Hokaido H600-M Turbo molecular vacuum pump (600 L/s, 5×10-6 Pa, 4000 Pa, 24000 r/min)

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Pumping speed(L/s): 600

Ultimate pressure(Pa):5×10-6

Max pre-pressure(Pa):4000

For N2 :107

For H2:1×103

Resistant atmosphere pressure or not:yes

Motor speed:24000 r/min

Start timemin:<10

Volume of lubricant oil: 260ml

Installation ways:vertical

Cooling ways:Water cooling

Cooling water consumption: 90L/h

Cooling water temperature: <24

Baking temperature: 100±10

Air inlet diametermm: DN160

Air outlet diameter mm:KF40

Datasheet

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