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Hokaido H160/800-FFD Turbo molecular vacuum pump (800L/s, 5×10-7 Pa, 100 Pa, 24000r/min)

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Pumping speed(L/s): 800

Ultimate pressure(Pa):5×10-7

Max pre-pressure(Pa): 100

For N2 : 108

For H2:1×104

Motor speed:24000 r/min

Start timemin:<10

Volume of lubricant oil: 260ml

Installation ways:vertical

Cooling ways:Water cooling

Cooling water consumption: 90L/h

Cooling water temperature: <24

Baking temperature: 100±10

Air inlet diametermm: DN160

Air outlet diameter mm:KF40

Datasheet

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