Fcon CUBEMFM-1030-4S2-5L-O2 Compact Flow Meter Unit (5SLM)

Flow range: 30 SLM

Gases: O2

Valve type: NO: Normally open

Accuracy: ±2％ F.S [※±1％ F.S Compatible] (Accuracy guaranteed between 15-35℃)

Output signal: 0～5VDC

Repeatability: ±0.2％ F.S

Response: Depends on MFC selected.

Operating differential pressure: Depends on MFC selected.

Pressure resistance: 1MPa(G)

Operating temperature: 5-50℃ (Accuracy guarantee between 15～35℃), ≦85％RH (No condensation permitted)

Leak integrity: 1×10-7Pa･m3/sec He

Drive power source: 100-240VAC: ≦500mA

Communication: Analog: 0～5VDC

Wetted surface material: SUS316L, PTFE, Fluoro-Rubber

Seal material: Fluoro-Rubber

Surface treatment: Machined finish

Standard fitting: 1/4in.SWL (equivalent)

Accessory: Power cord, User's manual, Written guarantee

Datasheet