Fcon CUBEGM-Xα4 Gax Mixer (10SCCM～20SLM, AC100-240V)

Size: W510×D400×H1100(mm)

Input power: AC100-240V

Current consumption: About 125VA ※In the case of 3 mass flow controllers equipped with

Flow rate control range: 1 LINE : F.S.10SCCM～20SLM (However, the mixed gas flow rate must be less than 50 SLM)

Flow rate control: MFC : C1000 Series or FCST1000L Series

Flow rate output signals: 0-5VDC

INLET, OUTLET Valve: Solenoid Valve

Leak Integrity: ≦5×10-7Pa･m3/sec He

Pressure resistance: 0.5MPa

Wetted surface material: SUS316, PTFE, Fluoro-Rubber (FCST1000L Series : Magnetic stainless steel, Fluoro-Rubber or Chloroprene rubber)

Standard fitting: 1/4in.SWL (equivalent)

Operating environment: 5-50℃, 30-80％RH (Scope of accuracy guarantee : 15-35℃)

Accessory: AC cable(2m), User's manual, Written guarantee

Datasheet