Brooks Instrument QMCC Controllers for Liquids & Gases

Flow Accuracy: Standard Flow Accuracy or [(zero stability/flow rate) x 100]% of rate, whichever is greater 

Standard Flow Accuracy: Liquid: 0.2%; Gas: 0.5% of rate

Zero Stability Stainless Steel Sensor (kg/hr): 0.00013/0.0010/0.0040

Repeatability & Reproducibility: +0.05% or +[0.5 x (zero stability/flowrate) x 100]% of rate whichever is greater

Response Time (Settling Time): 2% F.S. of final value,(per SEMI Guideline E17-91): <2 seconds

Temperature Coefficient Zero: 0.05% F.S./°C; Span: 0.035% F.S./°C

Control Range / Turndown: 100:1 or down to minimum flow

Ratings

Operating Temperature Range: 0 to 60ºC

Temperature Accuracy (Device): ±0.5ºC

Differential Pressure Range:

Liquid: 10 to 200 psi (0.69 to 13.8 bar) 

Gas: 10 to 150 psi (0.69 to 10.3 bar)

Maximum Operating Pressure: 

Standard: 500 psi (34.5 bar)

Optional: 1500 psi (103 bar)

Density Range: 0 to 2.0 g/cc

Density Accuracy: ±0.005 g/cc

Leak Integrity (External):

Elastomer: Outboard 1 x 10-9 atm. cc/sec., helium (max)

Metal Seal: 1 x 10-10 atm. cc/sec., helium (max)

For more details, see datasheet.

Datasheet

User Manual