Brooks Instrument GF101 Metal Sealed Thermal Mass Flow Controllers & Meters (55 slm - 300 slm, ±1% S.P. >35 - 100%, ±0.35% F.S. 2 - 35%)

Performance

F.S. Flow Ranges: 55 slm - 300 slm

Flow Accuracy: ±1% S.P. >35 - 100%; ±0.35% F.S. 2 - 35%

Repeatability & Reproducibility: <±0.15% S.P

Response Time (Settling Time) N.C. Valve: < 1 sec

Pressure Insentivity: not applicable

Control Range: 5 - 100% (N.C. Valve)

MultiFlo™: Standard

# of Bins: 4 bins

Valve Shut Down (N.C. Valve): <2% of F.S. @ 30 N2 psig/atm out

Zero Stability: <+0.5% F.S. per year

Temperature Coefficient: Zero: 0.005% F.S. per °C; Span: 0.05% F.S. per °C

Ratings

Operating Temperature Range: 10 - 50°C

Differential Pressure Range: 30 - 90 psid

Maximum Operating Pressure: Controller: 75 psig

Meter: 150 psig

Proof Pressure: 700 psia max

Design Pressure: 800 psia max

Burst Pressure: 3000 psia max

Leak Integrity (External):  1x10⁻¹⁰ atm. cc/sec He

For more details, see datasheet.

Datasheet

User Manual