Brooks Instrument GF100 Metal Sealed Thermal Mass Flow Controllers & Meters (3 sccm – 55 slm, ±1% S.P. >35 - 100%, ±0.35% F.S. 2 - 35%)

Performance

F.S. Flow Ranges: 3 sccm - 55 slm

Flow Accuracy: ±1% S.P. >35 - 100%,

                         ±0.35% F.S. 2 - 35%

Repeatability & Reproducibility: 5 - 100% = ±0.15% of S.P.

2 - 5% = ±0.015% of F.S.

Linearity: ±0.5% F.S. (included in accuracy)

Response Time (Settling Time) N.C. Valve: <1 sec

N.O. Valve: <1.5 sec

Control Range: 2 - 100% (Normally Closed Valve)

3 - 100% (Normally Open Valve) 

MultiFlo™: Standard

# of Bins: 11 bins

Valve Shut Down (N.C. Valve): Standard Hastelloy Valve: <1% of F.S

Zero Leak-by Valve: SH40 - SH41 <0.02% F.S.

SH42 - SH50 <0.005% F.S.

Valve Shut Down (N.O. Valve): 2% of F.S.

Zero Stability: <±0.5% F.S. per year

Temperature Coefficient: Zero: 0.005% F.S. per °C; Span: 0.05% F.S. per °C

Ratings

Operating Temperature Range: 10 - 50°C

Differential Pressure Range: 3 - 860 sccm = 7 - 45 psid

861 - 7200 sccm = 10 - 45 psid

7201 - 55000 sccm = 15 - 45 psid

Maximum Operating Pressure: 500 psia max

Proof Pressure: 700 psia max

Design Pressure: 800 psia max

Burst Pressure: 3000 psia max

Leak Integrity (External):  1x10⁻¹⁰ atm. cc/sec He

For more details, see datasheet.

Datasheet

User Manual