Brooks Instrument 5866RT Pressure Mass Flow Controllers (0–3 sccm/ 0–30.000 sccm N₂Eq)

PERFORMANCE

Flow Range: Any range from 0 to 3 sccm to 0 to 30,000 sccm N₂Eq.

Flow Output Signals: 0-5 Vdc, max. load 1 k ohm

Flow Accuracy: ±1.0% full scale including linearity at the calibration conditions. ±1.5% full scale for flow rates greater than 20 slpm

Flow Repeatability: ±0.25% of rate

Flow Temperature Coefficient: 0.1% full scale/°C

Pressure Ranges: Dependent upon remote transducer

Remote Pressure Sensor Input: Suitable for any pressure sensor with a 0-5 V or 0-10 V output signal

Pressure Setpoint Signal: 0-5 Vdc or 0-10 V. 5 Vdc reference output available for setpoint generation. 1 k ohm maximum load

Pressure Ratings: Maximum pressure: 1500 psig

Pressure Equipment Directive (PED) 97/23/EC: Equipment falls under Sound Engineering Practice (SEP)

Pressure Control Range: 100:1 for a remote transducer with a 0-10 V output

Pressure Response Time:

Less than 0.8 seconds typical for a 0-100% command step with less than 2% pressure overshoot

 Actual pressure response depends on system design

Temperature Range: 32 to 150°F (0-65°C)

Input/Output Offset: 0.2% full scale

Leak Integrity, Inboard to Outboard:

Elastomer Seal: 1 x 10⁻⁹ atm cc/sec Helium max.

Metal Seal: 1 x 10⁻¹⁰atm scc/sec Helium ma

 Datasheet

User Manual