Brooks Instrument 5851EMH High Temperature Mass Flow Controllers (10 - 100 lpm, 85°C)

- Valve: Normally Closed Control Valve

- Temperature range: 85°C Calibration Temperature

- PERFORMANCE:

Flow Range: 10 - 100 lpm (N2 equivalent)

Flow Accuracy: ±1% full scale

Control Range: 5-100%

Repeatability: ±0.25% of rate

Linearity: Included in accuracy

Response Time (Settling time within ± 2% for 0 - 100% command step): < 3 sec

- Ratings:

Operating Temperature Range: 50 - 105°C (122 - 221°F)

Maximum Pressure Rating: 1 MPaG (145 psig)

Pressure Differential (Controller): 50 -350 kPa (7 - 50 psid)

For more details, see datasheet.