Brooks Instrument 5851EM Gas Mass Flow Controllers & Meters (10 slpm ~ 100 slpm, 1.500 psi)

Performance:

Flow Ranges: Any full scale flow from 10 slpm to 100 slpm Nitrogen eq.,up to 200 slpm H2

Control Range: 50 - 1 with elastomeric valve seat

Repeatability: 0.25% of rate

Accuracy: 1% full scale including linearity, at calibration conditions 1.5% full scale including linearity, for flow ranges > 20 slpm

Settling Time: < 3 seconds to within 2% of full scale of final value for a 0 - 100% command step with normally closed valve

Mounting Attitude Sensitivity: ±0.5% full scale max. deviation from specified accuracy after rezeroing

Temperature Sensitivity: Zero: < ±0.075% full scale per ˚C; Span: < ±1.0% full scale shift over 10 - 50 ˚C range

Pressure Sensitivity: ±0.03% per psi up to 150 psig Nitrogen

Ratings:

Operating Pressure: 1,500 psi (10,342 MPa) max.

Differential Pressure Valve orifice sized for any pressure drop between 5 - 50 psi

(minimum pressure drop depends on gas and range - consult factory)

Ambient Temperature Limits: 41 ˚F to 149 ˚F (5 ˚C to 65 ˚C) 

Leak Integrity: Inboard to outboard 1x10-10 atm. cc/sec He max.

Electrical

Electrical Connections: 15-pin D-Connector (DA-15P)

Command Input: 0 - 5 Vdc (200 k ohms input resistance)

Output Signal: Voltage Option: 0 - 5 Vdc (Max load 2 k ohms) ±0.2% Reference (max load 2 k ohms)

5 Volt Reference Output: 5 Volts. ± 0.01 Vdc into 2,000 ohms minimum

Power Requirements: ±15 Vdc (±5%) at 350 mAdc, 10.5 watts

Power Supply Sensitivity: ±0.09% full scale over total power supply voltage ±15 Vdc (±5%) at 350 mAdc 10.5 watts power consumption

EMC Directive (89/336/EEC): Per 61326

Mechanical

Process Connections:

Integrally welded to body:

Standard: 1/4" VCR® with 0.250" bore

Optional: 3/8" - 1/2" VCR

Materials of Construction: 316L VAR (Vacuum Arc Remelt), 316L, and high alloy ferritic stainless steel

External Seals: Nickel 200

Internal Seals: Nickel 200

Valve Seat: 316L, Viton® fluoroelastomers, Buna-N, Kalrez® or Teflon®

For more details, see datasheet.

Datasheet

User Manual