Advanced Energy Paramount MF RF Plasma Generator (8.0kW, 400kHz)

- RF Power: 2.0 kW, 3.0 kW, 5.0 kW, 8.0 kW
- Frequency: 400 kHz, Frequency tuning ±10%
- Typical Tune Time: < 100 ms
- Power Accuracy into 50 Ω: ±2 W or ±1% of set point, whichever is greater
- Pulsing Frequency Range: 10 Hz ~ 2 kHz
- Available Serial Interface: RS-232, Ethernet, DeviceNet®, Profibus, EtherCAT®

- RF Power: 5.0 kW
- Frequency: 2 MHz, Frequency tuning ±10%
- Typical Tune Time: < 100 ms
- Power Accuracy into 50 Ω: ±1 W or ±1% of set point, whichever is greater
- Pulsing Frequency Range: 10 Hz ~ 10 kHz
- Available Serial Interface: RS-232, Ethernet, DeviceNet®, Profibus, EtherCAT®

Datasheet